AlN-Si Thin Film Bulk Acoustic Over-moded Resonator

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J. Korean Ceram. Soc. > Volume 37(12); 2000 > Article

Journal of the Korean Ceramic Society 2000;37(12): 1198.

AlN 압전 박막과 Si을 이용한 체적탄성파 Over-moded 공진기

이시형, 이전국¹, 김상희², 김종헌², 윤기현

연세대학교 세라믹공학과
¹한국과학기술연구원 박막기술연구센터
²광운대학교 전파공학과

AlN-Si Thin Film Bulk Acoustic Over-moded Resonator

Key words: Over-moded resonator, AlN, C-axis orientation, Coupling coefficient

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