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J. Korean Ceram. Soc. > Volume 37(6); 2000 > Article
Journal of the Korean Ceramic Society 2000;37(6): 524.
FHD 공정에 의한 저손실 실리카 슬랩 도파로 형성
심재기, 김태홍, 신장욱, 박상호, 김덕준, 성희경
한국전자통신연구원 실리카광부품팀
Fabrication of Low Loss Silica Slab Waveguide by Flame Hydrolysis Deposition
Silica slab wavegudie was fabricated on Si substrates by FHD for planar optical passive devices. The slab waveguide consists of lower clad and core layers, where core layer index is controlled by GeO2 addition. Doping of GeO2 in silica is difficult because of the low deposition density due to nonspherical particle generation in FHD process. Silica core particles deposited at various conditions such as flame temperature and substrate scanning were analyzed by SEM and TEM. As the flame temperature increased, the surface roughness of the core layer was decreased up to 3.6 nm after consolidation. Index difference and thickness of core of slab waveguide were 0.3%, 8$mutextrm{m}$ respectively. Measured optical loss at TE mode was <0.04 dB/cm at 1.3$mutextrm{m}$ and <0.06 dB/cm at 1.55$mutextrm{m}$.
Key words: Flame hydrolysis deposition, Silica slab waveguide, Consolidation
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