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J. Korean Ceram. Soc. > Volume 37(6); 2000 > Article
Journal of the Korean Ceramic Society 2000;37(6): 552.
R.F. Magnetron Sputtering을 이용한 리튬이차전지 정극용 ${LiMn_2}{O_4}$의 제조 및 특성
우태욱, 손영국
부산대학교 생산기술연구소(재료공학부)
Fabrication and Characterization of ${LiMn_2}{O_4}$ Cathode for Lithium Rechargeable Battery by R.F.Magnetron Sputtering
LiMn2O4 thin fiolm cathodes for Li-ion secondary battery were fabricated by r.f. magnetron sputtering technique. As-deposited films were amorphous. A spinel structure could not be obtained LiMn2O4 films by in-situ thermal annealing. After post thermal annealing over $700^{circ}C$ in oxygen atmosphere, LiMn2O4 films prepared above 100 W r.f. power could be crystallized into a spinel structure. The electrochemical property of the LiMn2O4 film cathodes was tested in a Li/1 M LiClO4 in PC/LiMn2O4 cell. From cyclic voltammetry at scan rate of 2mV/sec of 2.5~4.5V, LiMn2O4 electrode prepared by post annealing at 75$0^{circ}C$ showed good initial capacity. LiMn2O4 electrode prepared by post annealing at 80$0^{circ}C$ showed the best crycling performance.
Key words: Lithium battery, Microbattery, R.F. magnetron sputtering
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