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J. Korean Ceram. Soc. > Volume 36(10); 1999 > Article
Journal of the Korean Ceramic Society 1999;36(10): 1075.
화학적 용액법에 의한 에피탁샬 $LaSrCoO_3/SrTiO_3(100)$ 구조의 제조
이형민, 황규석, 송종은, 류현욱, 강보안, 윤연흠1, 김병훈
전남대학교 공과대학 세라믹공학과
1전남대학교 공과대학 자원공학과
Preparation of Epitaxial $LaSrCoO_3/SrTiO_3(100)$ Structures by The Chemical Solution Process
LaSrCoO3 thin films were spin-coated onto the SrTiO3(100) substrates by the chemical solution process. X-ray diffraction $theta$-2$theta$ scans and X-ray diffraction $beta$ scans were used to determine the crystallinity and in -plane alignment behavior of the films. The X-ray diffraction pattern showed the film obtained by annealing at 80$0^{circ}C$ was highly oriented. The X-ray diffraction pole-figure analysis and reciprocal-space mapping (2$theta$-$Delta$$omega$ scans) of the resulting film showed that the film comprising the pseduocubic phase had an epitaxial relationship with the SriO3 substrate.
Key words: $LaSrCoO_3/SrTiO_3(100)$ thin film, Pale-figure, reciprocal-space mapping
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