Preparation of Carbon-Containing Silica Glass by Heat Treatment of Ormosil

,; ,; ,; ,; ,; ,; ,; ,

J. Korean Ceram. Soc. > Volume 36(5); 1999 > Article

Journal of the Korean Ceramic Society 1999;36(5): 459.

세라믹/고분자 복합체의 열처리에 의한 탄소 함유 실리카 유리의 제조

김구대, 이동아, 박지애, 문지웅

한국과학기술연구원 세라믹공정연구센터

Preparation of Carbon-Containing Silica Glass by Heat Treatment of Ormosil

ABSTRACT

A carbon-containing silica glass was prepared from orgaincally modified silicate(Ormosil) by heat treatment in N2 atmosphere after the ormosil was synthesized using sol-gel method. The Ormosil was fabricated from the TEOS as the inorganic component and the PDMS as the organic component. The Ormosil changed to balck-coloured glass by carbon decomposed from the PDMS when the Ormosil was heated to 450$^{circ}C$ 20hrs. A dense silicon oxycarbide glass with 2.08 g/cm3 was obtained by heating the Ormosil at 1050$^{circ}C$ 10hrs. The microstructure of the carbon-containing silica glass was observed by SEM and the SiOxC4-x structure was confirmed by XPS measurement. The densification of the glass was studied by measurements of specific surface area linear shrinkage and geometric density.

Key words: Ormosil, Carbon glass, Silica glass, XPS, Heat treatment