Process Development for Synthesis of Ultra-low Dielectric SiO2 Aerogel Thin by Freeze Drying

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J. Korean Ceram. Soc. > Volume 36(3); 1999 > Article

Journal of the Korean Ceramic Society 1999;36(3): 307.

동결건조에 의한 극저유전성 실리카 에어로겔 박막 합성공정 개발

현상훈, 김태영

연세대학교 세라믹공학과

Process Development for Synthesis of Ultra-low Dielectric SiO2 Aerogel Thin by Freeze Drying

Key words: Porous silica thin film, Low dielectric thin film, Polymer silica sol, Spin coating, Freeze drying process

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