The Effect of Bismuth Composition Controlled by Heat Treating Heterostructure on the Ferroelectric Properties of SrBi<TEX>$_2$</TEX>Ta<TEX>$_{2-x}$</TEX>Nb<TEX>$_x$</TEX>O<TEX>$_9$</TEX>  Thin Films

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J. Korean Ceram. Soc. > Volume 35(10); 1998 > Article

Journal of the Korean Ceramic Society 1998;35(10): 1040.

Heterostructure 열처리에 의한 Bi 조성 제어가 SrBi$_2$Ta$_{2-x}$Nb$_x$O$_9$ 박막의 강유전 특성에 미치는 영향

박윤백, 이전국, 정형진, 박종완¹

한국과학기술연구원 박막기술연구센터
¹한양대학교 금속공학과

The Effect of Bismuth Composition Controlled by Heat Treating Heterostructure on the Ferroelectric Properties of SrBi$_2$Ta$_{2-x}$Nb$_x$O$_9$ Thin Films

ABSTRACT

Ferroelectric properties of{{{{ { { { {SrBi }_{2 }Ta }_{2-x }Nb }_{x }O }_{9 } }} (SBIN) thin films were affected by the amount of Bi content in SBTN. The addition of Bi into the SBTN films could be accomplished by heat treating SBTN/Bi2O3/SBTN het-erostructures fabricated by r.f. magnetron sputtering method. The variation of Bi content was controlled by changing the thickness of the sandwiched Bi2O3 in SBTN/Bi2O3/SBTN heterostructure from 50 to 400$AA$. As changing the thickness of the sandwiched Bi2O3 in Bi2O3 films was increased from 0 to 100$AA$ the grain grew faster and the ferroelectric pro-perties were improved. On the other hand when the thickness of Bi2O3 films was thicker than 150$AA$ the fer-roelectric properties were deteriorated Especially for SBTN thin films inserted by 400$AA$ Bi2O3 layer a Bi2Phase appeared as a second phase resulting in poor ferroelectric properties. The maximum remanent po-larization (2Pr) and coercive field(Ec) were obtained for the SBTN/Bi2O3/(100$AA$)/SBTN thin films. In this case 2Pr and Ec were 14.75 $mu$C/cm2 and 53.4kV/cm at an applied voltage of 3V respectively.

Key words: SrBi$_2$Ta$_{2-x}$Nb$_x$O$_9$, Bi$_2$O$_3$, Ferroelectrics, Perovskite structure, Multilayer heterostructure, Heat treatment, r-f