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J. Korean Ceram. Soc. > Volume 35(8); 1998 > Article
Journal of the Korean Ceramic Society 1998;35(8): 791.
Spin-coating 법으로 Nb-doped SrTiO$_3$(100) 기판위에 제조한 Pb(Zr, Ti)O$_3$ 박막의 에피탁시와 표면 미세구조에 미치는 열처리온도의 영향
이경무, 황규석, 김병훈
전남대학교 공과대학 세라믹공학과
Effects of Hear Treatment on Epitaxy and Surface Morphology of Pb(Zr, Ti)O$_3$ Films on Nb-Doped SrTiO$_3$(100) Substrates by Spin-Coating
ABSTRACT
The epitaxial Pb(Zr, Ti)O3 (Pb:Zr:Ti=1:0.52:0.48) thin films have been grown on Nb-doped SrTiO3(100) substrates by spin-coating technigue using metal naphthenates as starting m0) aterials,. Highly oriented films with homogeneous and smooth surfaces were obtained by heat-treatment at 75$0^{circ}C$ and X-ray diffraction pole-figure analysis ($beta$ scanning) showing that these films had an epitaxial relationship with substrates used. With increasing the heat-treatment temperature up to 80$0^{circ}C$ the films exhibited distinct polycrystalline grains while crystallinity and epitaxy in the films tended to decrease after annealing at 85$0^{circ}C$
Key words: Pb(Zr, Ti)O$_3$ thin, films, Nb-doped SrTiO$_3$(100), Metal naphthenates, Epitaxial relationship
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