|
|
|
Journal of the Korean Ceramic Society 1998;35(2): 145. |
| ZnGa$_2$O$_4$ 박막형광체 성장에 관한 연구 |
| 정영호, 김영진 |
| 경기대학교 재료공학과 |
| A Study on the Growth of ZnGa$_2$O$_4$ Thin Film Phosphors |
|
|
|
|
|
|
|
| ABSTRACT |
|
ZnGa2O4 thin film phosphors were deposited on Si(100) (111) wafers by rf magnetron sputtering. The ef-fects of substrates and deposition parameters on the growing mechanisms were studied. As a results of the effect of substrate temperature tranistions of growth orientation and different growing behaviors were ob-served. Also polycrystalline ZnGa2O4 thin film could not be achieved without oxygen gas. PL spectrum of ZnGa2O4 thin films were analyzed and showed broad band luminescence spectrum. |
| Key words:
ZnGa2O4, Spinel, Phosphor, Sputtering, Photoluminescence |
|
|
|
PDF Links
Full text via DOI 
Download Citation 
