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J. Korean Ceram. Soc. > Volume 34(2); 1997 > Article
Journal of the Korean Ceramic Society 1997;34(2): 188.
상입하에서의 실리카 에어로겔의 합성 및 박막코팅(I)
양희선, 최세영
연세대학교 세라믹공학과
Synthesis of Silica Aerogel and Thin Film Coating at Ambient
Wet gel with surface modification by TMCS was redispersed in EtOH and redispersed silica sol for coat-ing was prepared. After spin coating of redispersed sol was conducted on silicon substrate, processes of drying(8$0^{circ}C$) and heat treatment(>25$0^{circ}C$) were, followed at ambient pressure. The influence of heat treat-ment of properties of film was observed, changing temperature at heat treatment. The optimum redisp-ersion condition for stable silica sol was wet gel:EtOH=1g:110$mell$ and the concentration and viscosity of redispersed silica sol with average particle size of 30nm were 0.11 M, 2.0-2.2 cP respectively. Crack-free thin film with the refractive index of 1.14 and thickness of 400 nm was obtained through drying at 8$0^{circ}C$ and subsequent heat treatment at 45$0^{circ}C$ for 2 hrs respectively after spin coating of 1500rpm, 10 times.
Key words: TMCS, Surface modification, Redispersion, Ambient pressure, Heat treatment, Silica thin film, Spin coating
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