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J. Korean Ceram. Soc. > Volume 34(1); 1997 > Article
Journal of the Korean Ceramic Society 1997;34(1): 79.
졸-겔 스핀코팅법에 의한 반사방지 및 정전기방지 복층막의 제조 및 특성
이준종, 최세영
연세대학교 세라믹공학과
Preparation and Characterization of Anti-reflective and Anti-static Double Layered Films by Sol-Gel Spin-Coating Method
Anti-reflective and anti-static double layered films were prepared on the VDT panel by sol-gel spin-coating method. Their electrical, opticla, and mechanical properties were investigated. The outer SiO2 film with low re-fractive index was coated over the inner ATO(Antimony-doped Tin Oxide)-SiO2 film which was prepared by mixing ATO sol with SiO2 at molar ratio of 68:32 to satisfy the interference condition of double layers. The heat treatment was conducted at 45$0^{circ}C$ for 30 min where residual organics were completely removed. The sheet resistance of ATO single layer showed the minimum value of 6$times$107$Omega$/$square$ at 3 mol% addition of Sb and that of SiO2/ATO-SiO2 increased slightly with increasing SiO2 mol% up to 30 mol%, and then increased steeply to the value of 3$times$108$Omega$/$square$ at 32 mol%. The reflectance of double layered films was about 0.64% at the wavelength of 550nm and the transmittance increased about 3.20%. The hardness of double layered films was almost the same as that of uncoated VDT panel, 471.4kg.f/mm2.
Key words: Sol-gel, Spin-coating, Antistatic, Antireflective, Sheet Resistance, Reflectance, Hardness
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