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J. Korean Ceram. Soc. > Volume 33(7); 1996 > Article
Journal of the Korean Ceramic Society 1996;33(7): 735.
Sputtering 방법에 의해 제조된 Sb가 도핑된 주석산화물 박막의 특성에 관한 연구
김층완, 김광호, 이환수1, 이혜용1
부산대학교 무기재료공학과
Study on Properties of Antimony-doped Tin Oxide Thin Films Prepared by Sputtering
Antimony-doped Tin oxide (ATO) thin films were deposited on soda-lime glass substrates by DC magnetron sputtering technique. Effects of DC power film thickness and post heat-treatment on electrical conductivity of ATO film were investigated. Other properties of ATO film such as optical anti-chemical and wear properties were also reported in this work. The obtained ATO films showed electrical resistivities ranging from 5$times$10-3 $Omega$cm to 3$times$10-3 $Omega$cm with the average optical transparency above 80% in visible wavelength range and excel-lent anti-chemical properties where the electrical resistivity was not changed even after soaking the films in 1M HCl or 1M NaOH solution for 10 days. These properties were found to be related to the crystallinity of ATO film and the films having higher crystallinity showed better properties.
Key words: ATO film, DC magnetron sputtering, Film properties
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