Effects of Catalysts on Properties of Sol-Gel Derived <tex>$PbTiO_3$</tex> Thin Film

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J. Korean Ceram. Soc. > Volume 33(7); 1996 > Article

Journal of the Korean Ceramic Society 1996;33(7): 793.

$PbTiO_3$ 졸-겔 박막의 특성에 미치는 촉매의 영향

김승현, 김창은¹, 정형진, 오영제

한국과학기술원 세라믹스연구부
¹연세대학교 세라믹공학과

Effects of Catalysts on Properties of Sol-Gel Derived $PbTiO_3$ Thin Film

ABSTRACT

The effect of catalysts which was catalyzed by acid(HNO3) and base (NH4OH) or not on the surface microst-ructures and consequent dielectric characteristics of the PbTiO3 thin films prepared by sol-gel method were investigated. The result indicated that bse catalyst promoted the phase transformation of perovskite phase while acid catalyst was found to produce most uniform surface microstructure and improved dielectric properties However degradation of properties due to secondary phase formation and non-uniform microstructure at high annealing temperature (>75$0^{circ}C$) by rapid diffusion of lead was unavoidable in any case as long as Si(100)＼SiO2＼Pt substrate used,

Key words: Sol-gel, Catalyst, $PbTiO_3$, Interface, Dielectric property, Seed layer