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J. Korean Ceram. Soc. > Volume 33(3); 1996 > Article
Journal of the Korean Ceramic Society 1996;33(3): 313.
평면배향된 a-축 수직 $YBa_2Cu_3O_{7-x}$ 고온초전도 박막의 제작
성건용, 서정대
한국전자통신연구소
Fabrication of the in-plane Aligned a-Axis Oriented $YBa_2Cu_3O_{7-x}$ Thin Films
ABSTRACT
We have fabricated an in-plane aligned a-axis oriented YBa2Cu3O7-x (a-YBCO) thin film on a LaSrGaO4(100) substrate with a PrBa2Cu3O7-x(PBCO) template layer by two step plused laser deposition using 308 nm XeCl excimer laser. A YBCO layer and PBCO layer grown at low temperatures were used as template layers. We have investigated the effect of the deposition temperature of template layers on the superconducting and struc-tural properties of in-plane aligned a-YBCO thin films. An optimal deposition temperature of the PBCO template layers was 630. In-plane aligned a-YBCO thin films showed an anisotropy ratio in resistivity of 11.5 and a zero resistance temperature of 88 K.
Key words: High temperature superconducting thin films, $YBa_2Cu_3O_{7-x}$, $PrBa_2Cu_3O_{7-x}$ Pulsed laser deposition, In-plane alignment
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