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J. Korean Ceram. Soc. > Volume 32(6); 1995 > Article
Journal of the Korean Ceramic Society 1995;32(6): 685.
SiC/C 경사기능재료(FGM)의 합성을 위한 SiC/C 분율 조절
김유택, 최준태1, 최종건1, 오근호1
경기대학교 재료공학과
1한양대학교 세라믹공학과
The Control of SiC/C Ratio for the Synthesis of SiC/C Functionally Gradient Materials
The most important techniques in the synthesis of SiC/C function gradient material (FGM) are to control the SiC/C ratio and to obtain the moderate deposition rate. For these, various gas systems and flow rates were attempted and evaluated. It turned out that the CH4+SiCl4+H2 system was suitable for the deposition of SiC-rich layers, the C3H8+SiCl4+Ar system for the deposition of carbon-rich layers, and the C3H8+SiCl4+H2+Ar system was good to deposit the layers between them.
Key words: FGM, CVD, SiC/C, Composition gradient
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