Properties of Multilayer Glass-Ceramic Dielectrics

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J. Korean Ceram. Soc. > Volume 31(9); 1994 > Article

Journal of the Korean Ceramic Society 1994;31(9): 981.

다층 글라스세라믹 유전체의 결정화특성에 관한 연구

이헌수, 손명모, 박희찬¹

대구공업전문대학 요업과
¹부산대학교 무기재료공학과

Properties of Multilayer Glass-Ceramic Dielectrics

ABSTRACT

Crystallizable glasses with precipitation of celsian were prepared for the purpose of insulating dielectric layers for the devices such as integrated circuit substrates. Crystallization behavior of these glasses were studied by DTA, SEM, XRD analysis and by the measurement of dielectric properties. The base composition of the glass-ceramic consists in weight percent of 30% SiO2, 10% Al2O3, 26% BaO, 10% CaO, 10% ZnO, 8%TiO2 and 6% B2O3. 2-6 wt% Y2O3 were selected as the nucleating agent to promote monoclinic celsian formation. As a result, in barium-rich glasses containing 4~6wt% Y2O3 , monoclinic celsian was developed as major crystalline phase in the temperature range of 850~90$0^{circ}C$. Also, the dielectric constant and quality factor of these glass-ceramics were about 9 and more than 1000, respectively.