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J. Korean Ceram. Soc. > Volume 30(11); 1993 > Article
Journal of the Korean Ceramic Society 1993;30(11): 979.
MWCVD에 의한 다이아몬드 필름의 합성과 절삭 공구에의 응용
서문규, 김윤수1
청주대학교 화학과
1한국화학연구소 무기소재연구부
Diamond Film Synthesis by MWCVD and Its Application to Cutting Tools
Diamond films were synthesized using CH4-H2-Ar mixture gases by MWCVD, and cutting ability was tested after brazing them onto WC tools. Growth rates were in the range of 0.5~10${mu}{textrm}{m}$/hr depending on the deposition conditions, and diamond films with thickness of 100~300${mu}{textrm}{m}$ were obtained. Diamond tools brazed by RF induction method showed an enhanced cutting ability in the cutting test of Si single crystal rod.
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