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Journal of the Korean Ceramic Society 1993;30(11): 979. |
| MWCVD에 의한 다이아몬드 필름의 합성과 절삭 공구에의 응용 |
| 서문규, 김윤수1 |
청주대학교 화학과
1한국화학연구소 무기소재연구부 |
| Diamond Film Synthesis by MWCVD and Its Application to Cutting Tools |
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| ABSTRACT |
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Diamond films were synthesized using CH4-H2-Ar mixture gases by MWCVD, and cutting ability was tested after brazing them onto WC tools. Growth rates were in the range of 0.5~10${mu}{textrm}{m}$/hr depending on the deposition conditions, and diamond films with thickness of 100~300${mu}{textrm}{m}$ were obtained. Diamond tools brazed by RF induction method showed an enhanced cutting ability in the cutting test of Si single crystal rod. |
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