Effect of Pb Content on the Phase Transformation of Sputter-Deposited PZT Thin Film During RTA

,; ,; ,; ,; ,; ,

J. Korean Ceram. Soc. > Volume 30(10); 1993 > Article

Journal of the Korean Ceramic Society 1993;30(10): 803.

PZT 박막의 급속열처리시 Pb 함량이 상변태에 미치는 영향

주재현, 길덕신, 주승기

서울대학교 공과대학 금속공학과

Effect of Pb Content on the Phase Transformation of Sputter-Deposited PZT Thin Film During RTA

ABSTRACT

PbxZr0.4Ti0.6O3 thin films were prepared by reactive co-sputtering and annealed by RTA(Rapid Thermal Annealing) process. Effect of Pb content in PbxZr0.4Ti0.6O3 films on the phase transformation was intensively studied. It has been found out that depending on the Pb content as well as RTA temperature, crystal structure of PbxZr0.4Ti0.6O3 films change greatly. It turned out that transformation temperature for perovskite can be lowered and the width of transition temperature region was reduced by increasing Pb content in the film. And the lattice was expanded with increasing Pb content. With increasing RTA temperature, as-deposited phase was transformed into perovskite through three different transformation paths depending on Pb content. It was confirmed that activation energies for nucleation of perovskite structure are much larger than those of its growth.