A Study on the Structural Properties of rf Magnetron Sputtered <TEX>$Ba_{1-x}Sr_xTiO_3$</TEX> Thin Film

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J. Korean Ceram. Soc. > Volume 30(6); 1993 > Article

Journal of the Korean Ceramic Society 1993;30(6): 441.

Rf Magnetron Sputtering 방법으로 제조된 $Ba_{1-x}Sr_xTiO_3$ 박막의 구조적 특성에 대한 연구

김태송, 오명환¹, 김종희

한국과학기술원 무기재료공학과
¹한국과학기술연구원 이공학연구단

A Study on the Structural Properties of rf Magnetron Sputtered $Ba_{1-x}Sr_xTiO_3$ Thin Film

ABSTRACT

The Ba1-xSrxTiO3 thin films deposited on ITO-coated glass substrate at 55$0^{circ}C$ by rf magnetron sputtering method have individual preferential orientations as a function of composition (X=0, 0.25, 0.5, 0.75, 1) due to the stress relief interactions among the intrinsic compressive stress, thermal tensile stress adn extrinsic compressive stress (compressive stress in case of BaTiO3(Tc=12$0^{circ}C$) and Ba0.75Sr0.25TiO3(Tc=57$^{circ}C$)). This behavior also appears on the (BaSr)TiO3 thin films (X=0.5) deposited on ITO-coated glass substrate at deposition temperature between 35$0^{circ}C$ and 55$0^{circ}C$. The composition of Ba1-xSrxTiO3 thin films deposited on ITO-coated glass substrate at 55$0^{circ}C$ is close to stoichiometry (1.009~1.089 in A/B ratio), but the compositional deviation from a stoichiometry is larger as SrTiO3 is added. The morphology of Ba1-xSrxTiO3 thin films is very similar for over all substrate temperatures, and the roughness due to the differences of cluster size is the smallest at X=0.25.