Study of Laser Ablated Y-Ba-Cu-O Thin Films on <TEX>$LaAlO_3$</TEX>(100)Substrates

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J. Korean Ceram. Soc. > Volume 28(12); 1991 > Article

Journal of the Korean Ceramic Society 1991;28(12): 1005.

Laser Ablation에 의하여 $LaAlO_3$(100) 기판 위에 증착된 Y-Ba-Cu-O 박막에 대한 연구

조윌렴, 이규철, 고도경, 이헌주, 노태원, 김정구, 허필화¹

서울대학교 물리학과
¹금성중앙연구소

Study of Laser Ablated Y-Ba-Cu-O Thin Films on $LaAlO_3$(100)Substrates

ABSTRACT

Y-Ba-Cu-O thin films were in-situ fabricated on LaAlO3(100) substrates using the second harmonics of a pulsed Nd:YAG laser. Thin films were deposited under 200 (mtorr) of oxygen atmosphere, when the substrate temperature was changed between 67$0^{circ}C$ and 82$0^{circ}C$. After deposition, the films were in-situ annealed at 50$0^{circ}C$ under 2/3 bar of oxygen pressure. We showed that the deposition temperature affects the formation of superconducting phase, the resistance, and the surface morphology. The Y-Ba-Cu-O thin films deposited at 76$0^{circ}C$ show the zero resistance critical temperature of 85 K.