Fabrication of SnO2-TiO2-based Thick Films for Hydrocarbon Gas Sensors

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J. Korean Ceram. Soc. > Volume 28(9); 1991 > Article

Journal of the Korean Ceramic Society 1991;28(9): 721.

탄화수소계 가스센서를 위한 SnO2-TiO2계 후막의 제조

정완영, 박정은¹, 강봉휘, 이덕동

경북대학교 전자공학과
¹경북대학교 물리과

Fabrication of SnO2-TiO2-based Thick Films for Hydrocarbon Gas Sensors

ABSTRACT

SnO2-TiO2(Pt or Pd), as raw material for hydrocarbon gas sensors, was prepared by a coprecipitation method. The SnO2-TiO2-based thick film gas sensors were made by screen printing technique. The titanium dioxide synthesized was shown to be anatase structure from XRD peaks and was transformed to rutile structure between 700$^{circ}C$ and 1000$^{circ}C$. Titanium dioxide in SnO2-TiO2 thick films devices plays a very important role in the enhancement of the sensitivity to CH4 and C4H10. In the case of SnO2-TiO2(Pt) sensors, titanium dioxide that was rutile structure enhanced the sensitivity of the thick film to CH4. Platinum added to the raw powder at coprecipitation (as chloroplatinic acid VI hydrate) improved the gas sensitivity to hydrocarbon gases. Therefore, it is expected that the SnO2-TiO2(Pt) thick film sensors fabricated in this experiment could be put into practical use as LPG (primary component : C4H10 and C3H8) and LNG (primary component : CH4) sensors.