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Journal of the Korean Ceramic Society 1988;25(4): 380. |
Air 분위기에서 규소성형체의 질화반응 |
최석홍, 안영필 |
한양대학교 무기재료공학과 |
Nitridation of Silicon Powder Compacts in Air |
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ABSTRACT |
This investigation includes nitridation phenomena of silicon powder compacts in air. Nitridation reaction condition has been provided with using silicon nitride bed and active carbon additive. Reaction products are Oxynitride, $alpha$-Si3N4, and $beta$-Si3N4, Oxynitride(Si2N2O) phase in formed at outer surface layer ofsilicon powder compacts. $alpha$-Si3N4, and $beta$-Si3N4 are formed at inner region of powder compacts. Microstructural observation indicates that nitridation mechanism in this work is the same as conventional nitridation mechanism nitrogen gas. |
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