Electrical and Optical Properties of <TEX>$SnO_2$</TEX> Thin Films by Chemical Vapor Deposition

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J. Korean Ceram. Soc. > Volume 23(5); 1986 > Article

Journal of the Korean Ceramic Society 1986;23(5): 81.

화학증착법에 의한 $SnO_2$ Film의 전기적 및 광학적 성질

김광호, 김태옥, 천성순¹

부산대학교 무기재료공학과
¹한국과학기술원 재료공학과

Electrical and Optical Properties of $SnO_2$ Thin Films by Chemical Vapor Deposition

ABSTRACT

$SnO_2$ thin films have been prepared by chemical vapor deposition technique. Electrical and optical properties of the films have been investigated. It is found that the electrical condictivity and optical transparency of the films are most affected by deposition temperature and more affected by $SnCl_4$ partial pressure than by $O_2$ partial pressure. Experimental results show that the conductivity increases with high optical transparency as deposition temperature increases up to 50$0^{circ}C$ but the conductivity decreases with the loss of transparency as deposition temperature increases above $600^{circ}C$