The Effect of Initial Partial Pressure of Nitrogen on the Manufacturing of Reaction-Bonded Silicon Nitride

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J. Korean Ceram. Soc. > Volume 21(1); 1984 > Article

Journal of the Korean Ceramic Society 1984;21(1): 51.

반응결합 질화규소의 제조의 있어서 초기 질소분압의 영향

이근예, 이준근¹, 오재희²

한국과학기술원 정밀요업재료연구실
¹한국과학기술원 정밀 요업재료연구실
²인하대학교 무기재료공학과

The Effect of Initial Partial Pressure of Nitrogen on the Manufacturing of Reaction-Bonded Silicon Nitride

ABSTRACT

In this paper mechanical properties of reaction-bonded silicon nitride are studied with the variation of initial nitrogen partial pressure. At 1, 25$0^{circ}C$ the amount of nitridation and the nucleation of nitride increase linearly with the nitrogen partial pressure increase. After the nitridation is completed the density of nitride and modulus of rupture at room temperature are increased with the amount of nitridation. When the partial pressure of nitrogen is 0.5 atm the specimen show the optimum properties that is the highest density of nitride and modulus of rupture. Also the microstructure of $alpha$-matte is deveoped very well at that pressure of nitrogen which contributes to the strength development of specimen. It is shown that with proper control of initial partial pressure of nitrogen high strength silicon nitride body can be manufactured for dynamic applications.