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J. Korean Ceram. Soc. > Volume 13(2); 1976 > Article
Journal of the Korean Ceramic Society 1976;13(2): 8.
산화 주석 박막에 대하여
박순자
서울대학교 요업공학과
On the Stannic Oxide Thin Film
ABSTRACT
The conductive transparent film is prepared by spraying thin salt solution. In stannic chloride solution as a base solution, various dopants such as Al, Co, Cu and Ni were dissolved respectively as a chloride state and then the films were made by spraying solutions on hot glass plates. The properties of them were compared with those of the stannic salt single component film. The films doped with copper oxide and nickle oxide were improved by decreasing their sheet resistivity and temperature coefficient of resistivity. In comparison with the sheet resistivity and temperature coefficient of resistivity of stannic oxide single component film, being 2.5 K ohm/$textrm{cm}^2$ and -1650ppm/$^{circ}C$ respectively, its values of the film containing 15 mol % of copper oxide and formed at 40$0^{circ}C$ were 2.5K ohm/$textrm{cm}^2$ and -920ppm/$^{circ}C$ respectively. The film containing 15 mol % of nickel oxide and formed at 50$0^{circ}C$ has shown its sheet resistivity and temperature coefficient 0.7 K ohm/$textrm{cm}^2$ and -940ppm/$^{circ}C$ respectively.
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