| Home | E-Submission | Sitemap | Login | Contact Us |  
J. Korean Ceram. Soc. > Volume 47(5); 2010 > Article
Journal of the Korean Ceramic Society 2010;47(5): 467.
doi: https://doi.org/10.4191/kcers.2010.47.5.467
Electrical Properties of Eco-Friendly RuO2-Based Thick-Film Resistors Containing CaO-ZnO-B2O3-Al2O3-SiO2 계 유리가 적용된 질화알루미늄 기판용 RuO2계 친환경 후막저항의 전기적 특성 연구
김민식, 김형준, 김형태, 김동진1, 김영도2, 류성수
한국세라믹기술원 엔지니어링세라믹센터
2한양대학교 신소재공학부
Electrical Properties of Eco-Friendly RuO2-Based Thick-Film Resistors Containing CaO-ZnO-B2O3-Al2O3-SiO2 System Glass for AlN Substrate
Min-Sik Kim, Hyeong-Jun Kim, Hyung-Tae Kim, Dong-Jin Kim1, Young-Do Kim2, Sung-Soo Ryu
Engineering Ceramics Center, Korea Institute of Ceramic Engineering and Technology
1KMC Technology
2Materials Science & Engineering, Hanyang University
The objective of this study is to prepare lead-free thick film resistor (TFR) paste compatible with AlN substrate for hybrid microelectronics. For this purpose, CaO-ZnO-$B_2O_3-Al_2O_3-SiO_2$ glass system was chosen as a sintering aid of $RuO_2$. The effects of the weight ratio of CaO to ZnO in glass composition, the glass content and the sintering temperature on the electrical properties of TFR were investigated. $RuO_2$ as a conductive and glass powder were dispersed in an organic binder to obtain printable paste and then thick-film was formed by screen printing, followed by sintering at the range between $750^{circ}C$ and $900^{circ}C$ for 10 min with a heating rate of $50^{circ}C$/min in an ambient atmosphere. The addition of ZnO to glass composition and sintering at higher temperature resulted in increasing sheet resistance and decreasing temperature coefficient of resistance. Using $RuO_2$-based resistor paste containing 40 wt%glass of CaO-20.5%ZnO-25%$B_2O_3$-7%$Al_2O_3$-15%$SiO_2$ composition, it is possible to produce thick film resistor on AlN substrate with sheet resistance of $10.6Omega/spuare$ and the temperature coefficient of resistance of 702ppm/$^{circ}C$ after sintering at $850^{circ}C$.
Key words: Thick film resistor, $RuO_2$, AlN, Lead-free, CaO-ZnO-$B_2O_3-Al_2O_3-SiO_2$ glass
Editorial Office
Meorijae Bldg., Suite # 403, 76, Bangbae-ro, Seocho-gu, Seoul 06704, Korea
TEL: +82-2-584-0185   FAX: +82-2-586-4582   E-mail: ceramic@kcers.or.kr
About |  Browse Articles |  Current Issue |  For Authors and Reviewers
Copyright © The Korean Ceramic Society.                      Developed in M2PI