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Characterization of AlN Thin Films Grown by Pulsed Laser Deposition on Sapphire Substrate
Eun-Hee Jeong, Jun-Ki Chung, Rae-Young Jung, Sung-Jin Kim, Sang-Yeup Park
J. Korean Ceram. Soc.. 2013;50(6):551    DOI: https://doi.org/10.4191/kcers.2013.50.6.551

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