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A Study on the ZnO Piezoelectric Thin Film SAW Filter for High Frequency
J. Korean Ceram. Soc.. 2003;40(6):547    DOI:

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Investigation of High-Quality ZnO Film on Polycrystalline Diamond Wafer for Fabrication of High Frequency SAW Filter
Key Engineering Materials. 2007;336-338:242-245   Crossref logo

Piezoelectric thin film unidirectional SAW transducer and filter
Proceedings of the IEEE. 1978;66(1):102-104   Crossref logo

High-frequency surface acoustic wave filter based on diamond thin film
physica status solidi (a). 2011;208(5):1072-1077   Crossref logo
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Fabrication of high frequency ZnO thin film SAW devices on silicon substrate with a diamond-like carbon buffer layer using RF magnetron sputtering
Vacuum. 2008;83(3):675-678   Crossref logo
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High Frequency Thin-Film Piezoelectric Resonant Micro-Accelerometers with A Capacitive Mass-Spring Transducer
2020 IEEE SENSORS. 2020;   Crossref logo

4174. New sputtering system for manufacturing ZnO thin-film SAW devices. (USA)
Vacuum. 1979;29(11-12):459   Crossref logo
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Comments on "Epitaxially grown GaN thin-film SAW filter with high velocity and low insertion loss"
IEEE Transactions on Electron Devices. 2006;53(1):173-176   Crossref logo

Applications of piezoelectric ZnO film deposited on diamond-like carbon coated onto Si substrate under fabricated diamond SAW filter
Journal of Crystal Growth. 2004;262(1-4):461-466   Crossref logo
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Fabrication and characterization of high frequency SAW device with IDT/ZnO/AlN/Si configuration: role of AlN buffer
Thin Solid Films. 2004;447-448:605-609   Crossref logo
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ZnO Thin-Film SAW Devices
IEEE Transactions on Sonics and Ultrasonics. 1980;27(6):369-378   Crossref logo

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