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Surface Modification Using CVD-SiC |
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J. Korean Ceram. Soc.. 1996;33(7):761 |
Textile surface functionalisation by chemical vapour deposition (CVD) Epitaxial growth of 3C-SiC films on Si substrates by triode plasma CVD using dimethylsilane AES study of the SiO2/SiC interface in the oxidation of CVD β-SiC Surface characteristics of ion milled CVD SIC Surface preparation of 4H–SiC substrates for hot-wall CVD of SiC layers Radio frequency power dependence of the characteristics of 3C-SiC on Si grown by triode plasma CVD using dimethylsilane Surface modification of silicon related materials using a catalytic CVD system for ULSI applications Effect of CVD SiC seal coating on the mechanical properties of Cf/SiC composites generated through CVI Oxidation behavior of 2D C/SiC with a multi-layer CVD SiC coating Evaluation of surface characteristics of ground CVD-SiC using cast iron bond diamond wheels |
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