Effect of Working Pressure and Substrate Bias on Phase Formation and Microstructure of Cr-Al-N Coatings
Seon-A Choi, Seong-Won Kim, Sung-Min Lee, Hyung-Tae Kim, Yoon-Suk Oh
J. Korean Ceram. Soc. 2017;54(6):511-517. Published online 2017 Nov 29 DOI: https://doi.org/10.4191/kcers.2017.54.6.05
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