Quantum Mechanical Simulation for the Analysis, Optimization and Accelerated Development of Precursors and Processes for Atomic Layer Deposition (ALD)
Thomas Jeffrey Lomax Mustard, Hyunwook Shaun Kwak, Alexander Goldberg, Jacob Gavartin, Tsuguo Morisato, Daisuke Yoshidome, Mathew David Halls
J. Korean Ceram. Soc. 2016;53(3):317-324.   Published online 2016 May 31     DOI: https://doi.org/10.4191/kcers.2016.53.3.317
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