Preparation and Characterization of Low k Thin Film using a Preceramic Polymer
Jung-Ju Kim, Jung-Hyun Lee, Yoon-Joo Lee, Woo-Teck Kwon, Soo-Ryong Kim, Doo-Jin Choi, Hyung-Sun Kim, Young-Hee Kim
J. Korean Ceram. Soc. 2011;48(6):499     DOI: https://doi.org/10.4191/kcers.2011.48.6.499
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