Oxidation of CVD β-SiC in Impurity-Controlled Helium Environment at 950℃
Dae-Jong Kim, Weon-Ju Kim, Ji-Eun Jang, Soon-Gil Yoon, Dong-Jin Kim, Ji-Yeon Park
J. Korean Ceram. Soc. 2011;48(5):426 DOI: https://doi.org/10.4191/kcers.2011.48.5.426
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