Electrical and Optical Properties of Zinc Oxide Thin Films Deposited Using Atomic Layer Deposition
Jeong-Eun Kim, Seung-Muk Bae, Hee-Sun Yang, Jin-Ha Hwang
J. Korean Ceram. Soc. 2010;47(4):353     DOI: https://doi.org/10.4191/kcers.2010.47.4.353
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