Erosion Behavior of YAG Ceramics under Fluorine Plasma and their XPS Analysis
Kyeong-Beom Kim, Dae-Min Kim, Jung-Ki Lee, Yoon-Suk Oh, Hyung-Tae Kim, Hyung-Sun Kim, Sung-Min Lee
J. Korean Ceram. Soc. 2009;46(5):456     DOI: https://doi.org/10.4191/kcers.2009.46.5.456
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