Erosion Behavior of YAG Ceramics under Fluorine Plasma and their XPS Analysis
Kyeong-Beom Kim, Dae-Min Kim, Jung-Ki Lee, Yoon-Suk Oh, Hyung-Tae Kim, Hyung-Sun Kim, Sung-Min Lee
J. Korean Ceram. Soc. 2009;46(5):456     DOI:
Citations to this article as recorded by Crossref logo
Plasma-resistant characteristics according to sintering conditions of CaO–Al2O3–SiO2 glass coating layer
Yoon Sung Jung, Kyung Won Min, Jae Ho Choi, Ji Sob Yoon, Won Bin Im, Hyeong-Jun Kim
Journal of the Korean Ceramic Society.2022; 59(1): 86.     CrossRef
Plasma etching behavior of yttrium‐aluminum oxide composite ceramics
Yicheng Tan, Peng Chen, Zuoxiang Zhu, Shanghua Wu, Zhuo Tian
International Journal of Applied Ceramic Technology.2021; 18(5): 1710.     CrossRef
Divalent ion mixed effect of calcium aluminosilicate glasses (CAS) on thermal properties and fluorocarbon plasma resistance
Jewon Park, Hyein Na, Jae-Hyuk Park, Dae-Gun Kim, Sung-Churl Choi, Hyeong-Jun Kim
Journal of Non-Crystalline Solids.2020; 533: 119897.     CrossRef
Fabrication of Plasma Resistant Y2O3-Al2O3-SiO2 Coating Ceramics by Melt-Coating Method
Eui Keun Park, Hyun-Kwuon Lee
Korean Journal of Materials Research .2020; 30(7): 359.     CrossRef
Pulverization and Densification Behavior of YAG Powder Synthesized by PVA Polymer Solution Method
Hyun-Ho Im, Sang-Jin Lee
Korean Journal of Materials Research .2020; 30(11): 573.     CrossRef
Fabrication and Characterisitics of Al2O3-SiC Ceramic Composites for Electrostatic Discharge Safe Components
Ha-Neul Kim, Hyun-Myung Oh, Young-Jo Park, Jae-Woong Ko, Hyun-Kwuon Lee
Journal of Korean Powder Metallurgy Institute.2018; 25(2): 144.     CrossRef
Relative sputtering rates of oxides and fluorides of aluminum and yttrium
Dae-Min Kim, Mi-Ran Jang, Yoon-Suk Oh, Seongwon Kim, Sung-Min Lee, Sang-Ho Lee
Surface and Coatings Technology.2017; 309: 694.     CrossRef
Effect of Processing Parameters and Powder Size on Microstructures and Mechanical Properties of Y2O3 Coatings Fabricated by Suspension Plasma Spray
Sun-Joo Kim, Jung-Ki Lee, Yoon-Suk Oh, Seongwon Kim, Sung-Min Lee
Journal of the Korean Ceramic Society.2015; 52(6): 395.     CrossRef
Residual Stress and Elastic Modulus of Y2O3 Coating Deposited by EB-PVD and its Effects on Surface Crack Formation
Dae-Min Kim, Yoon-Soo Han, Seongwon Kim, Yoon-Suk Oh, Dae-Soon Lim, Hyung-Tae Kim, Sung-Min Lee
Journal of the Korean Ceramic Society.2015; 52(6): 410.     CrossRef
High erosion resistant Y2O3–carbon electroconductive composite under the fluorocarbon plasma
Kwan-Young Choi, Yoon-Suk Oh, Seongwon Kim, Sung-Min Lee
Ceramics International.2013; 39(2): 1209.     CrossRef
Effects of Sintering Temperature on the Electrical Conductivities of the Y2O3-Carbon Composites
Kwan-Young Choi, Yoon-Suk Oh, Sung-Won Kim, Hyung-Sun Kim, Chong-Hun Park, Sung-Min Lee
Journal of the Korean Ceramic Society.2012; 49(2): 173.     CrossRef
X-Ray Photoelectron Spectroscopy Study on the Interaction of Yttrium-Aluminum Oxide with Fluorine-Based Plasma
Dae-Min Kim, Sang-Ho Lee, William B. Alexander, Kyeong-Beom Kim, Yoon-Suk Oh, Sung-Min Lee
Journal of the American Ceramic Society.2011; 94(10): 3455.     CrossRef
The erosion behaviors of Y2O3 and YF3 coatings under fluorocarbon plasma
Dae-Min Kim, Yoon-Suk Oh, Seongwon Kim, Hyung-Tae Kim, Dae-Soon Lim, Sung-Min Lee
Thin Solid Films.2011; 519(20): 6698.     CrossRef
Effects of nitrogen incorporation on plasma erosion behaviors of oxynitride glasses
Jungki Lee, Seongjin Hwang, Sungmin Lee, Hyungsun Kim
Journal of Non-Crystalline Solids.2010; 356(31-32): 1559.     CrossRef
Phase Stability and Plasma Erosion Resistance of La-Gd-Y Rare-earth Oxide - Al2O3Ceramics
Kyeong-Beom Kim, Sung-Min Lee
Journal of the Korean Ceramic Society.2010; 47(6): 540.     CrossRef