Microstructural Changes of the Al2O3 Ceramics during the Exposure to Fluorine Plasma
Dae-Min Kim, Sung-Min Lee, Seong-Won Kim, Hyung-Tae Kim, Yoon-Suk Oh
J. Korean Ceram. Soc. 2008;45(7):405     DOI: https://doi.org/10.4191/kcers.2008.45.7.405
Citations to this article as recorded by Crossref logo
Effects of impurities on the slip viscosity and sintered properties of low-soda easy-sintered α-alumina
Min Ji Kang, Dang-Hyok Yoon
Journal of the Korean Ceramic Society.2022;[Epub]     CrossRef
Effect of CaF2 on fluorocarbon plasma resistance and thermal properties of CaO-Al2O3-SiO2 glasses
Jewon Park, Jae Ho Choi, Hyein Na, Hyeong-Jun Kim
Journal of Asian Ceramic Societies.2021; 9(1): 334.     CrossRef
Modification of a low-soda easy-sintered α-Al2O3 powder for the application in semiconductor/display production equipment
Athiruban Sakthisabarimoorthi, Min Ji Kang, Dang-Hyok Yoon
Korean Journal of Chemical Engineering.2021; 38(12): 2541.     CrossRef
Correlation of Plasma Erosion Resistance and the Microstructure of YF3 Coatings Prepared by Vacuum Kinetic Spray
Yeonju Kim, Hansol Kwon, Hyungkwon Park, Changhee Lee
Journal of Thermal Spray Technology.2020; 29(5): 1016.     CrossRef
Fabrication and Characterisitics of Al2O3-SiC Ceramic Composites for Electrostatic Discharge Safe Components
Ha-Neul Kim, Hyun-Myung Oh, Young-Jo Park, Jae-Woong Ko, Hyun-Kwuon Lee
Journal of Korean Powder Metallurgy Institute.2018; 25(2): 144.     CrossRef
Phase Stability and Plasma Erosion Resistance of La-Gd-Y Rare-earth Oxide - Al2O3Ceramics
Kyeong-Beom Kim, Sung-Min Lee
Journal of the Korean Ceramic Society.2010; 47(6): 540.     CrossRef
Erosion Behavior of YAG Ceramics under Fluorine Plasma and their XPS Analysis
Kyeong-Beom Kim, Dae-Min Kim, Jung-Ki Lee, Yoon-Suk Oh, Hyung-Tae Kim, Hyung-Sun Kim, Sung-Min Lee
Journal of the Korean Ceramic Society.2009; 46(5): 456.     CrossRef
Processing of Plasma Resistant Alumina Ceramics
Hyun-Kwuon Lee, Kyeong-Sik Cho, Mi-Young Kim
Journal of the Korean Ceramic Society.2009; 46(4): 385.     CrossRef
Effects of artificial pores and purity on the erosion behaviors of polycrystalline Al2O3 ceramics under fluorine plasma
Dae-Min KIM, Kyeong-Beom KIM, So-Young YOON, Yoon-Suk OH, Hyung-Tae KIM, Sung-Min LEE
Journal of the Ceramic Society of Japan.2009; 117(1368): 863.     CrossRef