Microstructural Changes of the Al2O3 Ceramics during the Exposure to Fluorine Plasma
Dae-Min Kim, Sung-Min Lee, Seong-Won Kim, Hyung-Tae Kim, Yoon-Suk Oh
J. Korean Ceram. Soc. 2008;45(7):405 DOI: https://doi.org/10.4191/kcers.2008.45.7.405
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