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HMDS Treatment of Ordered Mesoporous Silica Film for Low Dielectric Application
Tae-Jung Ha, Sun-Gyu Choi, Byoung-Gon Yu, Hyung-Ho Park
J. Korean Ceram. Soc.
2008;45(1):48
DOI:
https://doi.org/10.4191/kcers.2008.45.1.048
Cited By 1
Structural and Electrical Properties of SiO
2
/Si Film on La
0.7
Sr
0.3
MnO
3
Substrate by RF Magnetron Sputtering at Low Temperature
Sun-Gyu Choi, A. Sivasankar Reddy, Tae-Jung Ha, Byoung-Gon Yu, Hyung-Ho Park
J. Korean Ceram. Soc.
2007;44(11):645
DOI:
https://doi.org/10.4191/kcers.2007.44.1.645
1
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Materials Science, Ceramics - Q1
Journal Impact Factor 2.5