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Effect of surface treated amorphous Si–Zn–Sn–O on the electrical properties of thin film transistors by Ar plasma treatment
Ji Won Kim, Sang Yeol Lee
J. Korean Ceram. Soc. 2024;61(5):941-947.   Published online May 27, 2024
DOI: https://doi.org/10.1007/s43207-024-00409-6
      
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