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Journal of the Korean Ceramic Society
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The Properties and
Uniformity
Change of Amorphous SiC:H Film Deposited using Remote PECVD System with Various Deposition Conditions
Sung-Hyuk Cho, Yoo-Youl Choi, Doo-Jin Choi
J. Korean Ceram. Soc.
2010;47(3):262
DOI:
https://doi.org/10.4191/kcers.2010.47.3.262
Cited By 1
1
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Materials Science, Ceramics - Q1
Journal Impact Factor 2.5