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The Properties and Uniformity Change of Amorphous SiC:H Film Deposited using Remote PECVD System with Various Deposition Conditions
Sung-Hyuk Cho, Yoo-Youl Choi, Doo-Jin Choi
J. Korean Ceram. Soc. 2010;47(3):262
DOI: https://doi.org/10.4191/kcers.2010.47.3.262
         Cited By 1
Characterization of Tribological Properties of DLC Films Prepared by Different Deposition Method
Yoon-Suk Oh
J. Korean Ceram. Soc. 2009;46(5):497
DOI: https://doi.org/10.4191/kcers.2009.46.5.497
      
Low Index Contrast Planar SiON Waveguides Deposited by PECVD
Yong-Tak Kim, Seok-Gyu Yoon, Dae-Ho Yoon
J. Korean Ceram. Soc. 2005;42(3):178
DOI: https://doi.org/10.4191/kcers.2005.42.3.178
         Cited By 1
SiON/SiO2 Multilayer Deposited by PECVD for Low-Loss Waveguides
김용탁, 김동신, 윤대호
J. Korean Ceram. Soc. 2004;41(3):197
DOI: https://doi.org/10.4191/kcers.2004.41.3.197
      
Refractive Index Control of Silicon Oxynitride Thick Films on Core Layer of Silica Optical Waveguide
김용탁, 조성민, 윤석규, 서용곤, 임영민, 윤대호
J. Korean Ceram. Soc. 2002;39(6):594
DOI: https://doi.org/10.4191/kcers.2002.39.6.594
      
Optical Properties and Structural Analysis of SiO2 Thick Films Deposited by Plasma Enhanced Chemical Vapor Deposition
Sung-Min Cho, Yong-Tak Kim, Yong-Gon Seo, Hyung-Do Yoon, Young-Min Im, Dae-Ho Yoon
J. Korean Ceram. Soc. 2002;39(5):479
DOI: https://doi.org/10.4191/kcers.2002.39.5.479
         Cited By 1
The Effect of RF Power and $SiH_4$/($N_2$O+$N_2$) Ratio in Properties of SiON Thick Film for Silica Optical Waveguide
김용탁, 조성민, 서용곤, 임영민, 윤대호
J. Korean Ceram. Soc. 2001;38(12):1150
      
Effects of $N_2O$/$SiH_4$Flow Ratio and RF Power on Properties of $SiO_2$Thick Films Deposited by Plasma Enhanced Chemical Vapor Deposition
조성민, 김용탁, 서용곤, 임영민, 윤대호
J. Korean Ceram. Soc. 2001;38(11):1037
      
Deposition of 3C-SiC Films by Plasma-enhanced Chemical Vapor Deposition (I): Deposition Behaviors of SiC with Deposition Parameters
김광호, 서지윤, 윤석영
J. Korean Ceram. Soc. 2001;38(6):531
      
Deposition of 3C-SiC Films by Plasma-enhanced Chemical Vapor Deposition (II): Mechanical Properties of SiC Films by Nanoindentation Technique
김광호, 윤석영, 서지윤, 김창열, Koichi Niihara
J. Korean Ceram. Soc. 2001;38(4):365
      
Deposition Behaviors and Electrical Properties of Sb-doped $SnO_2$ Films by Plasma Enhanced Chemical Vapor Deposition
김근수, 서지윤, 이희영, 김광호
J. Korean Ceram. Soc. 2000;37(2):194
      
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