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Nanoindentation Experiments on MEMS Device
한준희, 박준협, 김광석, 이상율
J. Korean Ceram. Soc.
2003;40(7):657
DOI:
https://doi.org/10.4191/kcers.2003.40.7.657
1
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Materials Science, Ceramics - Q1
Journal Impact Factor 2.7