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Change of Refractive Index and Residual Stresses of Ta2O5 Thin Film Prepared by Dual Ion Beam Sputtering Deposition as the Substrate Temperature and Assist ion Beam Energy
Seok-Gyu Yeon, Yong-Tak Kim, Hwek-Yung Kim, Myoung-Jin Kim, Hyung-Man Lee, Dae-Ho Yoon
J. Korean Ceram. Soc. 2005;42(1):28
DOI: https://doi.org/10.4191/kcers.2005.42.1.028
         Cited By 1
Control of Residual Stress in Diamond Film Fabricated by Hot Filament CVD
최시경, 정대영, 최한메
J. Korean Ceram. Soc. 1995;32(7):793
      
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