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Interaction of DEMS with H-terminated Si (001) Surface: A First Principles Study
Dae-Hyun Kim, Dae-Hee Kim, So-Yeon Park, Hwa-Il Seo, Do-Hyoung Lee, Yeong-Cheol Kim
J. Korean Ceram. Soc.
2009;46(4):425
DOI:
https://doi.org/10.4191/kcers.2009.46.4.425
1
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Materials Science, Ceramics - Q1
Journal Impact Factor 2.5