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Chemical Vapor Deposition of Tantalum Carbide from TaCl
5
-C
3
H
6
-Ar-H
2
System
Daejong Kim, Sang Min Jeong, Soon Gil Yoon, Chang Hyun Woo, Joung Il Kim, Hyun-Geun Lee, Ji Yeon Park, Weon-Ju Kim
J. Korean Ceram. Soc.
2016;53(6):597-603. Published online November 30, 2016
DOI:
https://doi.org/10.4191/kcers.2016.53.6.597
Cited By 11
1
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Materials Science, Ceramics - Q1
Journal Impact Factor 2.5