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Author :
Young-Joon Baik 1 Articles
620 Effect of Moisture in a Vacuum Chamber on the Deposition of c-BN Thin Film using an Unbalanced Magnetron Sputtering Method
Eun-Sook Lee, Jong-Keuk Park, Wook-Seong Lee, Tae-Yeon Seong, Young-Joon Baik
J. Korean Ceram. Soc. 2012;49(6):620
DOI: https://doi.org/10.4191/kcers.2012.49.6.620
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