| Fabrication of Large-Size Alumina by Pressure-Vacuum Hybrid Slip Casting |
| Kyeong-Sik Cho, Seung Yeul Lee1 |
School of Advanced Materials and System Engineering, Kumoh National Institute of Technology
1Dicera Co. Ltd. |
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| ABSTRACT |
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The size of various alumina ceramics used in the semiconductor and display industries must be increased to increase the size of wafers and panels. In this research, large alumina ceramics were fabricated by pressure-vacuum hybrid slip casting (PVHSC) employing a commercial powder, followed by sintering in a furnace. In the framework of the PVHSC method, the consolidation occurs not only by compression of the slip in the casting room but also by suction of the dispersion medium from the casting room. When sintered at $1650^{circ}C$ for 4 h, the fabricated large-size alumina ($1,550{times}300{times}30mm^3$) exhibited a dense microstructure corresponding to more than 99.2% of the theoretical density and a high purity of 99.79%. The flexural and compressive strengths of the alumina plate were greater than 340 MPa and 2,600 MPa, respectively. |
| Key words:
Alumina, Slip casting, Microstructure, Strength |
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