| 직접질화법 AlN 분말의 소결거동 및 열전도도에 미치는 고에너지 볼밀링 효과 |
| 박해룡, 김형태, 이성민, 김영도1, 류성수 |
한국세라믹기술원 엔지니어링세라믹센터
1한양대학교 신소재공학부 |
| Effect of High Energy Ball Milling on Sintering Behavior and Thermal Conductivity of Direct Nitrided AlN Powder |
| Hae-Ryong Park, Hyung-Tae Kim, Sung-Min Lee, Young-Do Kim1, Sung-Soo Ryu |
Engineering Ceramics Center, Korea Institute of Ceramic Engineering and Technology
1Division of Materials Science and Engineering, Hanyang University |
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| ABSTRACT |
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In this study, a high energy ball milling process was introduced in order to improve the densification of direct nitrided AlN powder. The sintering behavior and thermal conductivity of the AlN milled powder was investigated. The mixture of AlN powder and 5 wt% $Y_2O_3$ as a sintering additive was pulverized and dispersed by a bead mill with very small $ZrO_2$ bead media. The milled powders were sintered at $1700^{circ}C-1800^{circ}C$ for 4 h under $N_2$ atmosphere. The results showed that the sintered density was enhanced with increasing milling time due to the particle refinement as well as the increase in oxygen contents. Appropriate milling time was effective for the improvement of thermal conductivity, but the extensive millied powder formed more fractions of secondary phase during sintering, resulted in the decrease in thermal conductivity. The AlN powder milled for 10min after sintering at $1800^{circ}C$ revealed the highest thermal conductivity, of 164W/$m{cdot}K$ in tne densified AlN sintered at $1800^{circ}C$. |
| Key words:
AlN, Direct nitridation, A high energy ball milling, Liquid phase sintering, Thermal conductivity |
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