| 다양한 온도에서 염소가스 반응에 의해 표면 개질된 SiC의 트라이볼로지 특성평가 |
| 배흥택, 정지훈, 최현주, 임대순 |
| 고려대학교 신소재공학과 |
| Estimation of Tribological Properties on Surface Modified SiC by Chlorine Gas Reaction at Various Temperatures |
| Heung-Taek Bae, Ji-Hoon Jeong, Hyun-Ju Choi, Dae-Soon Lim |
| Department of Materials Science and Engineering, Korea University |
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| ABSTRACT |
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Carbon layers were fabricated on silicon carbide by chlorination reaction at temperatures between $1000^{circ}C$ and $1500^{circ}C$ with $Cl_2/H_2$ gas mixtures. The effect of reaction temperature on the micro-structures and tribological behavior of SiC derived carbon layer was investigated. Tribological tests were carried out ball-on-disk type wear tester. Carbon layers were characterized by X-ray diffractometer, Raman spectroscopy and surface profilometer. Both friction coefficients and wear rates were maintained low values at reaction temperature up to $1300^{circ}C$ but increased suddenly above this temperature. Variation of surface roughness as a function of reaction temperature was dominant factor affecting tribological transition behavior of carbon layer derived from silicon carbide at high temperature. |
| Key words:
Tribology, Silicon carbide, CDC (Carbide derived carbon), Carbon layer, Surface roughness |
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