Characterization of Cold Hollow Cathode Ion Source by Modification of Electrode Structure

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doi:2003.40.10.967

J. Korean Ceram. Soc. > Volume 40(10); 2003 > Article

Journal of the Korean Ceramic Society 2003;40(10): 967.
doi: https://doi.org/10.4191/kcers.2003.40.10.967

전극 구조 변화에 따른 Cold Hollow Cathode Ion Source의 특성 변화

석진우, V. S. Chernysh¹, 한성, 백영환, 고석근, 윤기현²

주식회사 피앤아이 기술연구소
¹국립모스크바대학교 물리학과
²연세대학교 세라믹공학과

Characterization of Cold Hollow Cathode Ion Source by Modification of Electrode Structure

ABSTRACT

The inner-diameter 5 cm cold hollow cathode ion source was designed for the high current density and the homogeneous beam profile of ion beam. The ion source consisted of a cylindrical cathode, a generation part of magnetic field, a plasma chamber, convex type ion optic system with two grid electrode, and DC power supply system. The cold hollow cathode ion sources were classified into standard type (I), electron output electrode modified type (II). The operation of the ion source was done with discharge current, ion beam potential and argon gas flow rate. The modification of electron output electrode resulted in uniform plasma generation and uniform area of ion beam was extended from 5 cm to 20 cm. Improved ion source was evaluated with beam uniformity, ion current, team extraction efficiency, and ionization efficiency.

Key words: Cold cathode, Ion source, Ion beam, Plasma, Beam profile