A Study on fabrication of Ferroelectric SBT Thin Films by Liquid Delivery MOCVD Process

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doi:2003.40.1.46

J. Korean Ceram. Soc. > Volume 40(1); 2003 > Article

Journal of the Korean Ceramic Society 2003;40(1): 46.
doi: https://doi.org/10.4191/kcers.2003.40.1.046

Liquid Delivery MOCVD 공정을 이용한 강유전체 SBT 박막의 제조기술에 관한 연구

강동균, 백승규, 송석표, 김병호

고려대학교 재료공학과

A Study on fabrication of Ferroelectric SBT Thin Films by Liquid Delivery MOCVD Process

ABSTRACT

Ferroelectric $Sr_{0.7}Bi_{2.1}Ta_{2.0}O_9$ thin films with 200 nm thicknesses were deposited on $Pt/Ti/SiO_2/Si$ substrate by liquid delivery MOCVD process. In these experiments, $Sr(TMHD)_2{cdot}pmdeta,; Bi(ph)_3$ and $Ta(O^i/Pr)_4(TMHD)$ were used as precursors, which were dissolved in n-butyl acetate and pentamethyldiethylenetriamine. Substrate temperature and reactor pressure of this experiment was $570^{circ}C$and 5 Torr, respectively. The remanent polarization value (2Pr) of SBT thin film with annealed at $780^{circ}C$was$7.247{mu}C/cm^2$and$8.485 {mu}C/cm^2$by applying 3 V and 5 V, respectively.

Key words: MOCVD, SBT, Ferroelectric